Low-temperature vapour phase deposition of bismuth sulphide films

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Published under licence by IOP Publishing Ltd
, , Citation M E Rincón and P K Nair 1997 Semicond. Sci. Technol. 12 467 DOI 10.1088/0268-1242/12/4/023

0268-1242/12/4/467

Abstract

A nearly stoichiometric bismuth sulphide precipitate obtained as a by-product of the chemical deposition technique is used as a source in low-temperature vapour phase deposition of thin films. At relatively low deposition temperatures () highly polycrystalline films are formed on glass substrates, while very thin films are obtained at lower temperatures (95 - 250). The highest photocurrent () is found in the first group while the highest photosensitivity (S = 56) is found in the amorphous or too thin films. XRD patterns of bismuth sulphide powder before and after 5 h deposition show its enrichment in Bi due to the enrichment in S and sulphur-rich bismuth sulphide species of the vapour phase. For films deposited at temperatures in the range of 290 - 380, the change in composition of the source causes different deposition rates and preferential growth of some of the bismuthinite planes ( for as-deposited powder and for bismuth-rich sources), compositional changes in the films (stratification) does not seem to be relevant at these temperatures. The bandgap of the films decreases as the deposition temperature increases from at to 1 - 1.3 eV at . Similar results were obtained with different sources, which indicates the stronger dependence of with respect to substrate temperature than with respect to the type of source.

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10.1088/0268-1242/12/4/023