The Physical Properties of Hydrogenated Amorphous Silicon

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Published under licence by IOP Publishing Ltd
, , Citation G Winterling and G Müller 1986 Phys. Scr. 1986 45 DOI 10.1088/0031-8949/1986/T13/007

1402-4896/1986/T13/45

Abstract

In recent years semiconductor devices based on hydrogenated amorphous silicon (a-Si:H) have received increasing attention. Application areas include: Photovoltaics, electro-photography, image sensing and active matrix addressing of liquid crystal displays. In this paper the physical properties of a-Si:H are reviewed and compared with those of single and polycrystalline silicon.

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10.1088/0031-8949/1986/T13/007