Growth of Multilayer Optics for Synchrotron Radiation Sources

W/B₄C multilayers have been deposited using magnetron sputtering with period ranging from 3.5 nm to 1.6 nm and layer pairs up to 300 to be used as soft x-ray /hard x-ray monochromators and soft x-ray polarizers. Normal incidence mirrors have been developed to be used in 12.5−13.5 nm using Mo/Si with reflectivity of ~ 67 % at 13 nm. In addition, high thermal stability NbC/Si multilayers in this wavelength range have been developed. The reflectivity of these mirrors is comparable with Mo/Si but have much higher thermal stability compared to Mo/Si. We have also deposited thermally stable C/B₄C, low Z/low Z multilayer. These mirrors can be used as polarizer and high resolution soft x-ray monochromators.