Abstract
This paper proposed a MEMS air turbine generator. The conventional miniature power sources like a battery required a replacement. Therefore, it is limitation for an IoT (Internet of Things) device, and it is required to develop a miniature generator. The proposed generator shows a millimetre scale structure that combined the different technology. The MEMS process is used for the miniature air turbine structure. To achieve the high output power, the electromagnetic induction type is employed. The miniature magnetic circuit is fabricated by the multilayer ceramic technology. Fluorocarbon gas is used as a working fluid to generate the rotational motion of the rotor. By this reason, the miniature power generation system will be realized in the future. Dimensions of the fabricated MEMS power generator were 5.62 mm, 6.17 mm, and 7.12 mm, respectively. The rotational motion was demonstrated using R245fa of fluorocarbon gas. The maximum rotational speed was 154,620rpm when the outside temperature was 46.3 Celsius degree. The output voltage was 10 mV at the load resistance of 1 kΩ. The calculated output power was 0.6 mVA at when the load resistance was 2 Ω.
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