Abstract
The purpose of this research is design of a magnetron deposition technology for quartz glasses of optically transparent nanocomposite protective coatings based on Al-Si-N with preliminary modification of the substrate surface by a high-energy Ni+ ion beam. The coating improves the mechanical properties and resistance of the glass to the impact of highspeed iron microparticles. The structural-phase state and elemental composition of the coatings and the surface layer of the substrate are investigated by electron microscopy, electron-probe analysis, and secondary ion mass spectrometry.
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