Abstract
One possibility of reducing the influence of contamination of the plasma volume, when initiating the microwave discharges using antennas, is to cover the antenna with a dielectric. The results of 1-D and 2-D modeling showing the impact of such dielectric cover on the parameters of a non-equilibrium plasma of an electrode microwave discharge in hydrogen at reduced pressure (the change of the electrodynamics of the discharge, charge deposition on the dielectric surface, changing the catalytic properties of the surface of the antenna) are presented in the article.
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