Paper The following article is Open access

Influence of antenna dielectric cover on the parameters of the electrode microwave discharge

, , and

Published under licence by IOP Publishing Ltd
, , Citation Yu A Lebedev et al 2016 IOP Conf. Ser.: Mater. Sci. Eng. 158 012062 DOI 10.1088/1757-899X/158/1/012062

1757-899X/158/1/012062

Abstract

One possibility of reducing the influence of contamination of the plasma volume, when initiating the microwave discharges using antennas, is to cover the antenna with a dielectric. The results of 1-D and 2-D modeling showing the impact of such dielectric cover on the parameters of a non-equilibrium plasma of an electrode microwave discharge in hydrogen at reduced pressure (the change of the electrodynamics of the discharge, charge deposition on the dielectric surface, changing the catalytic properties of the surface of the antenna) are presented in the article.

Export citation and abstract BibTeX RIS

Content from this work may be used under the terms of the Creative Commons Attribution 3.0 licence. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI.

Please wait… references are loading.
10.1088/1757-899X/158/1/012062