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Title:
Characterization of thermal distortion effects on beamline optics for EUV interferometry and soft x‐ray microscopy
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Review of Scientific Instruments [0034-6748] Beguiristain, R yr:1996
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Beguiristain, R
Underwood, J H
Koike, M
Batson, P
Medecki, H
Rekawa, S
Jackson, K
Attwood, D
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Koike, M
Batson, P
Medecki, H
Rekawa, S
Jackson, K
Attwood, D
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Underwood, J H
Koike, M
Batson, P
Medecki, H
Rekawa, S
Jackson, K
Attwood, D
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