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Title:
Thermal conductivity of micromachined low-stress silicon-nitride beams from 77 to 325 K
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Journal of Applied Physics [0021-8979] Sultan, Rubina yr:2009
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Sultan, Rubina
Avery, A D
Stiehl, G
Zink, B L
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Stiehl, G
Zink, B L
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Avery, A D
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