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Title:
Influence of preamorphization on the structural properties of ultrashallow arsenic implants in silicon
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Journal of Applied Physics [0021-8979] Capello, L yr:2006
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Author
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author:
Capello, L
Metzger, T H
Werner, M
van den Berg, J A
Servidori, M
Ottaviano, L
Bongiorno, C
Mannino, G
Feudel, T
Herden, M
Holý, V
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author:
Capello, L
Metzger, T H
Werner, M
van den Berg, J A
Servidori, M
Ottaviano, L
Bongiorno, C
Mannino, G
Feudel, T
Herden, M
Holý, V
last name
initials
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Web of Science
author:
Capello, L
Metzger, T H
Werner, M
van den Berg, J A
Servidori, M
Ottaviano, L
Bongiorno, C
Mannino, G
Feudel, T
Herden, M
Holý, V
last name
initials
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