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Title:
Scanning capacitance spectroscopy: An analytical technique for pn-junction delineation in Si devices
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Applied Physics Letters [0003-6951] Edwards, Hal yr:1998
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Author
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GeoRef
author:
Edwards, Hal
McGlothlin, Rudye
San Martin, Richard
Gribelyuk, Michael
Mahaffy, Rachel
Shih, C K
List, R S
Ukraintsev, Vladimir A
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initials
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author:
Edwards, Hal
McGlothlin, Rudye
San Martin, Richard
Gribelyuk, Michael
Mahaffy, Rachel
Shih, C K
List, R S
Ukraintsev, Vladimir A
last name
initials
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author:
Edwards, Hal
McGlothlin, Rudye
San Martin, Richard
Gribelyuk, Michael
Mahaffy, Rachel
Shih, C K
List, R S
Ukraintsev, Vladimir A
last name
initials
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