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Title:
Nitrogen plasma annealing for low temperature Ta2O5 films
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Applied Physics Letters [0003-6951] Alers, G B yr:1998
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author:
Alers, G B
Fleming, R M
Wong, Y H
Dennis, B
Pinczuk, A
Redinbo, G
Urdahl, R
Ong, E
Hasan, Z
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author:
Alers, G B
Fleming, R M
Wong, Y H
Dennis, B
Pinczuk, A
Redinbo, G
Urdahl, R
Ong, E
Hasan, Z
last name
initials
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author:
Alers, G B
Fleming, R M
Wong, Y H
Dennis, B
Pinczuk, A
Redinbo, G
Urdahl, R
Ong, E
Hasan, Z
last name
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