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Title:
Diffusion, activation, and regrowth behavior of high dose P implants in Ge
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Applied Physics Letters [0003-6951] Satta, A yr:2006
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Satta, A
Simoen, E
Duffy, R
Janssens, T
Clarysse, T
Benedetti, A
Meuris, M
Vandervorst, W
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author:
Satta, A
Simoen, E
Duffy, R
Janssens, T
Clarysse, T
Benedetti, A
Meuris, M
Vandervorst, W
last name
initials
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author:
Satta, A
Simoen, E
Duffy, R
Janssens, T
Clarysse, T
Benedetti, A
Meuris, M
Vandervorst, W
last name
initials
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