ExLibris header image
SFX Logo
Title: Activation volume for arsenic diffusion in germanium
Source:

Applied Physics Letters [0003-6951] Mitha, Salman yr:1996


Collapse list of basic services Basic
Full text
Full text available via AIP Digital Archive
GO
Full text available via AIP Journals (American Institute of Physics)
GO
Document delivery
Request document via Library/Bibliothek GO
Users interested in this article also expressed an interest in the following:
1. OZTURK, MC. "OPTIMIZATION OF THE GERMANIUM PREAMORPHIZATION CONDITIONS FOR SHALLOW-JUNCTION FORMATION." IEEE transactions on electron devices 35.5 (1988): 659-668. Link to SFX for this item
2. Boussaid, F. "Electrically active defects in BF2+ implanted and germanium preamorphized silicon." Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms 134.2 (1998): 195-201. Link to Full Text for this item Link to SFX for this item
3. HATTANGADY, SV. "LOW-TEMPERATURE ANNEALING OF AS-IMPLANTED GE." Journal of applied physics 63.1 (1988): 68-74. Link to Full Text for this item Link to SFX for this item
4. WALKER, AJ. "SHALLOW BORON JUNCTIONS AND PREAMORPHIZATION FOR DEEP SUBMICRON SILICON TECHNOLOGY." Journal of applied physics 73.8 (1993): 4048-4053. Link to Full Text for this item Link to SFX for this item
5. TRUMBORE, FA. "SOLID SOLUBILITIES OF ANTIMONY, ARSENIC, AND BISMUTH IN GERMANIUM FROM A SATURATION DIFFUSION EXPERIMENT." Journal of the Electrochemical Society 109.8 (1962): 734-738. Link to SFX for this item
6. Bracht, H. "Experiments and simulation on diffusion and activation of codoped with arsenic and phosphorous germanium." Journal of applied physics 108.2 (2010): 24903-24910. Link to SFX for this item
7. CHEN, WJ. "INTERFACIAL REACTIONS OF NICKEL THIN-FILMS ON BF2+-IMPLANTED (001)SI." Journal of applied physics 70.5 (1991): 2628-2633. Link to Full Text for this item Link to SFX for this item
8. Li, HJ. "Boron retarded diffusion in the presence of indium or germanium." IEEE electron device letters 23.11 (2002): 646-648. Link to SFX for this item
Select All Clear All

Expand list of advanced services Advanced
A service provided by the Library of the Wissenschaftspark Albert Einstein, Potsdam, Germany.
© 2005 SFX by Ex Libris Inc.