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Title:
Sub‐10 nm lithography with self‐assembled monolayers
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Applied Physics Letters [0003-6951] Lercel, M J yr:1996
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Lercel, M J
Craighead, H G
Parikh, A N
Seshadri, K
Allara, D L
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Craighead, H G
Parikh, A N
Seshadri, K
Allara, D L
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Lercel, M J
Craighead, H G
Parikh, A N
Seshadri, K
Allara, D L
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