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Title:
Initial growth mechanism of atomic layer deposited TiN
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Applied Physics Letters [0003-6951] Satta, A yr:2004
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Satta, A
Vantomme, A
Schuhmacher, J
Whelan, C M
Sutcliffe, V
Maex, K
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Vantomme, A
Schuhmacher, J
Whelan, C M
Sutcliffe, V
Maex, K
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Satta, A
Vantomme, A
Schuhmacher, J
Whelan, C M
Sutcliffe, V
Maex, K
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