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Title:
Atomic Layer Deposition of Silicon Nitride from Bis(tert-butylamino)silane and N2 Plasma
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Acs Applied Materials & Interfaces [1944-8244] Knoops, Harm C. M. yr:2015
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author:
Knoops, Harm C. M.
de Peuter, Koen
Potts, Stephen E
Haukka, Suvi
Pore, Viljami
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author:
Knoops, Harm C. M.
de Peuter, Koen
Potts, Stephen E
Haukka, Suvi
Pore, Viljami
last name
initials
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