Abstract
Laser transfer processing (LTP) offers the potential to overcome the problems of integrating ferroelectric thin and thick film materials with polymers and other technologically useful substrate materials that cannot sustain the high process temperatures, 600–1,000 °C, required for normal film deposition. The LTP technique involves the fabrication of a ceramic film on a high-temperature substrate material such as sapphire, and subsequent release by application of pulsed ultra-violet laser radiation. Here, the LTP technique is reviewed in the context of ferroelectric thin and thick films, and current developments are presented. Micro- and nanostructural features of the films before and after transfer to a second substrate are revealed using scanning and transmission electron microscopy. The consequences of laser-generated structural changes on ferroelectric properties are illustrated, and measures to mitigate the effects of an amorphous damage-layer are discussed.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
Tsakalakos L, Sands T (2000) Appl Phys Lett 76:2
Tsakalakos L, Sands T, Carleton E, Yu KM (2003) J Appl Phys 94(6):4047
Xu B, Rodkin A, Zesch J, White D, Buhler S, Fitch J, Littau K (2004) Ceram Trans 167:245
Xu B, White D, Zesch J, Rodkin A, Buhler S, Fitch J, Littau K (2005) Appl Phys Lett 87(19):192902/1
Xu B, Rodkin A, Zesch J, White D, Buhler S, Fitch J, Littau K (2005) In: Proceedings of the 107th annual meeting of the American Ceramic Society, Baltimore, Maryland, USA
Chakraborty T, Miles R, Milne S (2007) In: Proceedings of the 109th annual meeting of the American Ceramic Society, Detroit, Michegan, USA
Comyn TP, Chakraborty T, Miles RE, Milne SJ (2008) Appl Phys Lett 93(5):052909/1
Dorey RA, Duval FFC, Haigh RD, Whatmore RW (2002) Ferroelectrics 267:373
Zhang Q, Corkovic S, Shaw CP, Huang Z, Whatmore RW (2005) Thin Solid Films 488(1–2):258
Bae JC, Kim SS, Choi EK, Song TK, Kim W-J, Lee Y-I (2005) Thin Solid Films 472(1–2):90
Majumder SB, Jain M, Martinez A, Katiyar RS, Van Keuls FW, Miranda FA (2001) J Appl Phys 90(2):896
Fedulov SA, Ladyzhinskii PB, Pyatigorskaya LI, Venevtsev YN (1964) Fiz Tverd Tela 6(2):475
Njiwa ABK, Aulbach E, Roedel J, Turner SL, Comyn TP, Bell AJ (2006) J Am Ceram Soc 89(5):1761
Song J-K, Um W-S, Lee H-S, Kang M-S, Chung K-W, Park J-H (2000) J Eur Ceram Soc 20(6):685
Sunder VVSSS, Halliyal A, Umarji AM (1995) J Mater Res 10(5):1301
Acknowledgements
The authors wish to thank the UK Engineering and Physical Sciences Research Council for awards under the Engineering Functional Ceramics programme
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
James, C., Chakraborty, T., Brown, A. et al. Laser transfer processing for the integration of thin and thick film ferroelectrics. J Mater Sci 44, 5325–5331 (2009). https://doi.org/10.1007/s10853-009-3609-2
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s10853-009-3609-2