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Title:
Effect of the dielectric–substrate interface on charge accumulation from vacuum ultraviolet irradiation of low-k porous organosilicate dielectrics
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Thin Solid Films [0040-6090] Sinha, H yr:2011
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author:
Sinha, H
Sehgal, A
Ren, H
Nichols, M T
Tomoyasu, M
Russell, N M
Nishi, Y
Shohet, J L
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author:
Sinha, H
Sehgal, A
Ren, H
Nichols, M T
Tomoyasu, M
Russell, N M
Nishi, Y
Shohet, J L
last name
initials
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author:
Sinha, H
Sehgal, A
Ren, H
Nichols, M T
Tomoyasu, M
Russell, N M
Nishi, Y
Shohet, J L
last name
initials
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