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Title:
The effect of argon dilution on deposition of microcrystalline silicon by microwave plasma enhanced chemical vapor deposition
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Thin Solid Films [0040-6090] Soppe, W J yr:2007
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Soppe, W J
Devilee, C
Geusebroek, M
Löffler, J
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Devilee, C
Geusebroek, M
Löffler, J
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