SFX by Ex Libris Inc.

Title:	Combining grazing incidence X-ray diffraction and X-ray reflectivity for the evaluation of the structural evolution of HfO2 thin films with annealing
Source:	Thin Solid Films [0040-6090] Wiemer, C yr:2004

Basic

Sorry, no full text available...

Please use the document delivery service (see below)

Holding information

Holdings in library search engine ALBERT

Document delivery

Request document via Library/Bibliothek

Users interested in this article also expressed an interest in the following:
description	1.	Miyagi, L. "Quantitative Rietveld texture analysis of CaSiO3 perovskite deformed in a diamond anvil cell." Journal of physics. Condensed matter 18.25 (2006): 995-.
description	2.	Lysaght, P.S. S. "Physicochemical properties of HfO 2 in response to rapid thermal anneal." Applied physics letters 82.8 (2003): 1266-8.
description	3.	Kojima, I. "XRR and XPS studies of SiO2 thin films formed by r.f. magnetron sputtering." Surface and interface analysis 28.1 (1999): 267-270.
description	4.	Chua, L. "Observation of field-effect transistor behavior at Self-organized interfaces." Advanced materials 16.18 (2004): 1609-1615.
description	5.	Bernstorff, S. "XRR and GISAXS study of silicon oxynitride films." Applied surface science 253.1 (2006): 33-37.
description	6.	Snaith, Henry J. "Self-organization of nanocrystals in polymer brushes. Application in heterojunction photovoltaic diodes." Nano letters 5.9 (2005): 1653-1657.
description	7.	Sirringhaus, H. "Two-dimensional charge transport in self-organized, high-mobility conjugated polymers." Nature 401.6754 (1999): 685-688.
description	8.	Pivac, B. "GISAXS study of Si nanostructures in SiO2 matrix for solar cell applications." Physica status solidi. A, Applications and materials science 210.4 (2013): 755-759.
description	9.	Morais, J. "Integrity of hafnium silicate/silicon dioxide ultrathin films on Si." Applied physics letters 81.16 (2002): 2995-2997.
description	10.	Ilavsky, J. "Annealing behavior of atomic layer deposited HfO2 films studied by synchrotron x-ray reflectivity and grazing incidence small angle scattering." Journal of applied physics 105.10 (2009): 103522-103532.
description	11.	Miyagi, L. "Diamond anvil cell deformation of CaSiO3 perovskite up to 49 GPa." Physics of the earth and planetary interiors 2009. 159-164.
description	12.	Hoshino, Y. "Characterization and control of the HfO2/Si(001) interfaces." Applied physics letters 81.14 (2002): 2650-2.
description	13.	Ischia, G. "Quantitative Rietveld texture analysis of zirconium from single synchrotron diffraction images." Journal of applied crystallography 38.2 (2005): 377-380.
description	14.	Vogt, M. "Plasma-deposited passivation layers for moisture and water protection." Surface & coatings technology 74-75.PART 2 (1995): 676-681.
description	15.	Robbins, JJ. "An interrogation of the zinc oxide-gallium oxide phase space by plasma enhanced chemical vapor deposition." Journal of crystal growth 263.1-4 (2004): 283-290.
description	16.	Wang, XG. "Threshold voltage (V-th) instability in HfO2 high-kappa gate stacks with TiN metal gate: Comparison between NH3 and O-3 interface treatments." IEEE electron device letters 25.11 (2004): 719-721.
description	17.	Mate, C. "New methodologies for measuring film thickness, coverage, and topography." IEEE transactions on magnetics 36.1 (2000): 110-114.
description	18.	Paglia, G. "Comment on "Examination of spinel and nonspinel structural models for gamma-Al2O3 by DFT and rietveld refinement simulations"." The journal of physical chemistry. B, Condensed matter, materials, surfaces, interfaces & biophysical 110.41 (2006): 20721-20723.
description	19.	KIDO, J. "MULTILAYER WHITE LIGHT-EMITTING ORGANIC ELECTROLUMINESCENT DEVICE." Science 267.5202 (1995): 1332-1334.
description	20.	Li, B. "Temperature dependence of SiO2/Si interfacial structure formed by radio-frequency magnetron sputter deposited SiO2 thin films on Si(111)." Journal of vacuum science & technology. A, An international journal devoted to vacuum, surfaces, and films 17.2 (1999): 552-554.