Language
English
German
^M
Dutch
Spanish
Title:
Sensor fabrication using thin film-on-silicon approaches
Source:
Thin Solid Films [0040-6090] Müller, G yr:1997
Basic
Full text
Full text available via
EZB-NALI5-00465 Elsevier Archive NL
Year:
Volume:
Issue:
Start Page:
Document delivery
Request document via
Library/Bibliothek
Users interested in this article also expressed an interest in the following:
description
1.
Cote, D. R. R.
"Plasma-assisted chemical vapor deposition of dielectric thin films for ULSI semiconductor circuits."
IBM journal of research and development
43.1 (1999): 5-38.
description
2.
ECCLESTON, W.
"A REVIEW OF THE PLASMA OXIDATION OF SILICON AND ITS APPLICATIONS."
Semiconductor Science and Technology
8.7 (1993): 1426-1433.
description
3.
Guha, S.
"High deposition rate amorphous siliconâbased multijunction solar cell."
Applied physics letters
66.5 (1995): 595-.
description
4.
Anderson, T.
"Deposition of WNxCy thin films for diffusion barrier application using the dimethylhydrazido (2(-)) tungsten complex (CH3CN)Cl4W(NNMe2)."
Thin Solid Films
517.21 (2009): 6038-6045.
description
5.
COTE, DR.
"LOW-TEMPERATURE CHEMICAL-VAPOR-DEPOSITION PROCESSES AND DIELECTRICS FOR MICROELECTRONIC CIRCUIT MANUFACTURING AT IBM."
IBM journal of research and development
39.4 (1995): 437-464.
description
6.
Kuchta, D.
"Performance of fiber-optic data links using 670-nm cw VCSELs and a monolithic Si photodetector and CMOS preamplifier."
IBM journal of research and development
39.1 (1995): 63-72.
description
7.
Woodward, TK.
"1-Gb/s integrated optical detectors and receivers in commercial CMOS technologies."
IEEE journal of selected topics in quantum electronics
5.2 (1999): 146-156.
description
8.
Hess, DW.
"Plasma-assisted oxidation, anodization, and nitridation of silicon."
IBM Journal of Research and Development
43.1 (1999): 127-145.
description
9.
이제용, Je Y.
"공중합에 의해 제조된 온도와 pH 응답성 하이드로젤의 체적 전이온도, 팽윤거동 및 방출 특성 변화 ( Variation in Volume Transition Temperature, Swelling Behavior and Release Property of Temperature and pH-Responsive Hydrogels by Copolymerization )."
응용화학
(2003): 447-.
description
10.
Batey, J.
"Plasma-enhanced CVD of high quality insulating films."
Applied surface science
39.1-4 (1989): 1-15.
description
11.
Mahan, Mahan H.
"A direct correlation between film structure and solar cell efficiency for HWCVD amorphous silicon germanium alloys.(Report)."
Thin solid films
517.12 (2009): 3532-.
description
12.
Wu, F.
"Microstructure evaluation and mechanical properties of nanolayered chromium nitride/tungsten nitride coating."
Journal of Electronic Materials
2005. 1533-1537.
description
13.
Armini, S.
"Composite polymer-core silica-shell abrasive particles during oxide CMP."
Journal of the Electrochemical Society
154.8 (2007): -6.
description
14.
Shelley, P.
"MOSFET Degradation Kinetics and Its Simulation."
IEEE transactions on electron devices
50.6 (2003): 1445-1450.
description
15.
Jani, O.
"Design and characterization of GaN/InGaN solar cells."
Applied physics letters
91.13 (2007): 132117-3.
description
16.
Green, Martin A. A.
"Solar cell efficiency tables (version 29)."
Progress in photovoltaics
15.1 (2007): 35-40.
description
17.
Hsiao, R.
"Fabrication of magnetic recording heads and dry etching of head materials."
IBM journal of research and development
43.1-2 (1999): 89-102.
description
18.
Dezelah, C.
"A low valent metalorganic precursor for the growth of tungsten nitride thin films by atomic layer deposition."
Journal of materials chemistry
17.11 (2007): 1109-1116.
View More...
View Less...
Select All
Clear All
Save Citations
Select Format
ProCite
Reference Manager
RefWorks
EndNote
Submit citation export
Advanced
Author
Other articles by this author? -- in
GeoRef
author:
Müller, G
Deimel, P P
Hellmich, W
Wagner, C
last name
initials
Other articles by this author? -- in
Online Contents Geosciences
author:
Müller, G
Deimel, P P
Hellmich, W
Wagner, C
last name
initials
Other articles by this author? -- using
Web of Science
author:
Müller, G
Deimel, P P
Hellmich, W
Wagner, C
last name
initials
Web Search
Find related information in
a Web Search Engine
Excite
Google
HotBot
Ixquick
ZOO
Ask
Yahoo!
Bing
Naver
Search Terms:
Search for related information in
Google Scholar
Article Title
Author Name
Journal Title
Other Search
Search Terms:
A service provided by the
Library of the Wissenschaftspark Albert Einstein
, Potsdam, Germany.
© 2005 SFX by Ex Libris Inc.