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Title:
Synchrotron X-ray diffraction topography study of bonding-induced strain in silicon-on-insulator wafers
Source:
Thin Solid Films [0040-6090] Lankinen, A yr:2016
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author:
Lankinen, A
Tuomi, T O
Kostamo, P
Jussila, H
Sintonen, S
Lipsanen, H
Tilli, M
Mäkinen, J
Danilewsky, A N
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author:
Lankinen, A
Tuomi, T O
Kostamo, P
Jussila, H
Sintonen, S
Lipsanen, H
Tilli, M
Mäkinen, J
Danilewsky, A N
last name
initials
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author:
Lankinen, A
Tuomi, T O
Kostamo, P
Jussila, H
Sintonen, S
Lipsanen, H
Tilli, M
Mäkinen, J
Danilewsky, A N
last name
initials
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