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Title:
Development of a process modeling for residual stress assessment of multilayer thin film structure
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Thin Solid Films [0040-6090] Wang, H J yr:2015
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Wang, H J
Deng, H A
Chiang, S Y
Su, Y F
Chiang, K N
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Deng, H A
Chiang, S Y
Su, Y F
Chiang, K N
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Deng, H A
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Su, Y F
Chiang, K N
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