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Title: Compressive stress, preferred orientation and film composition in Ti-based coatings developed by plasma immersion ion implantation-assisted deposition
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Surface & Coatings Technology [0257-8972] Mukherjee, S yr:2004


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Users interested in this article also expressed an interest in the following:
1. Mukherjee, S. "Intrinsic stress and preferred orientation in TiN coatings deposited on Al using plasma immersion ion implantation assisted deposition." Thin solid films 445.1 (2003): 48-53. Link to SFX for this item
2. "X-ray stress measurement for TiN films evaporated by PVD." Thin solid films 307.1: 178-182. Link to SFX for this item
3. Vlasveld, A C. "Characterisation and performance of partially filtered arc TiAlN coatings." Surface & coatings technology 149.2-3 (2002): 217-224. Link to Full Text for this item Link to SFX for this item
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