ExLibris header image
SFX Logo
Title: Surface improvements of industrial components treated by plasma immersion ion implantation (PIII): results and prospects
Source:

Surface & Coatings Technology [0257-8972] Ueda, M yr:2002


Collapse list of basic services Basic
Full text
Full text available via EZB-NALI5-00465 Elsevier Archive NL
GO
Document delivery
Request document via Library/Bibliothek GO
Users interested in this article also expressed an interest in the following:
1. Mandl, S. "Biocompatibility of titanium based implants treated with plasma immersion ion implantation." Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms 206 (2003): 517-521. Link to SFX for this item
2. Dubois, P. "Microactuators based on ion implanted dielectric electroactive polymer (EAP) membranes." Sensors and actuators. A, Physical 130.SPEC. ISS. (2006): 147-154. Link to SFX for this item
3. Mandl, S. "Interplay of surface adsorption and preferential sputtering in metal plasma immersion ion implantation and deposition." Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms 206 (2003): 663-667. Link to SFX for this item
4. Smirnov, V K. "Wave-ordered structures formed on SOI wafers by reactive ion beams." Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms 147.1-4 (1999): 310-315. Link to Full Text for this item Link to SFX for this item
5. Arthur, G. "Manufacture of micro-sensors and actuators for flow control." Microelectronic Engineering 83.4 (2006): 1205-8. Link to SFX for this item
6. Rauschenbach, B. "Plasma-sheath expansion around trenches in plasma immersion ion implantation." Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms 206 (2003): 803-807. Link to SFX for this item
7. Lacour, S. "Design and performance of thin metal film interconnects for skin-like electronic circuits." IEEE electron device letters 25.4 (2004): 179-181. Link to SFX for this item
8. Pelrine, R. "Applications of dielectric elastomer actuators." Proceedings of SPIE--the international society for optical engineering 4329.1 (2001): 335-349. Link to SFX for this item
9. Buguin, A. "Micro-actuators: When artificial muscles made of nematic liquid crystal elastomers meet soft lithography." Journal of the American Chemical Society 128.4 (2006): 1088-1089. Link to Full Text for this item Link to SFX for this item
10. Hamley, I. W. "Melt structure and its transformation by sequential crystallization of the two blocks within poly(L-lactide)-block-poly(epsilon-caprolactone) double crystalline diblock copolymers." Macromolecular chemistry and physics 207.11 (2006): 941-953. Link to Full Text for this item Link to SFX for this item
Select All Clear All

Expand list of advanced services Advanced