ExLibris header image
SFX Logo
Title: An investigation of RF sputter etched silicon surfaces using helium ion backscatter
Source:

Solid-State Electronics [0038-1101] Sachse, Glen yr:1975


Collapse list of basic services Basic
Full text
Full text available via Elsevier SD Backfile Physics
GO
Full text available via EZB-NALI5-00465 Elsevier Archive NL
GO
Document delivery
Request document via Library/Bibliothek GO
Users interested in this article also expressed an interest in the following:
1. Das, SK. "Radiation blistering of polycrystalline niobium by helium-ion implantation." Journal of applied physics 44.1 (1973): 25-31. Link to Full Text for this item Link to SFX for this item
2. Primak, W. "Radiation Blistering: Interferometric and Microscopic Observations of Oxides, Silicon, and Metals." Journal of applied physics 37.6 (1966): 2287-2294. Link to Full Text for this item Link to SFX for this item
3. Das, SK. "On the correlation of blister diameter and blister skin thickness in helium-ion-irradiated Nb." Journal of applied physics (1979): 3304-. Link to Full Text for this item Link to SFX for this item
4. Hochbauer, T. "Physical mechanisms behind the ion-cut in hydrogen implanted silicon." Journal of applied physics 92.5 (2002): 2335-2342. Link to SFX for this item
5. Peiner, E. "Diamond-like carbon for MEMS." Journal of Micromechanics and Microengineering 17.7 (2007): 83-90. Link to Full Text for this item Link to SFX for this item
6. WEHNER, G. "CONE FORMATION AS A RESULT OF WHISKER GROWTH ON ION BOMBARDED METAL-SURFACES." Journal of vacuum science & technology. A. Vacuum, surfaces, and films 3.4 (1985): 1821-1835. Link to SFX for this item
7. Land, C E E. "Estimating cancer risks from low doses of ionizing radiation." Science 209.4462 (1980): 1197-203. Link to SFX for this item
8. Kaminsky, M. "Correlation between blister skin thickness, the maximum in the damage-energy distribution, and projected ranges of He ions in metals: Nb." Applied physics letters (1975): 521-. Link to Full Text for this item Link to SFX for this item
9. Kohn, E. "Concepts for diamond electronics." Thin Solid Films 515.10 (2007): 4333-4339. Link to SFX for this item
10. Forbes, I. "Diamond and hard carbon films for microelectromechanical systems (MEMS) - a nanotribological study." Thin Solid Films 420.421 (2002): 508-514. Link to Full Text for this item Link to SFX for this item
11. Cho, S. "Young's modulus, Poisson's ratio and failure properties of tetrahedral amorphous diamond-like carbon for MEMS devices." Journal of Micromechanics and Microengineering 15.4 (2005): 728-735. Link to Full Text for this item Link to SFX for this item
12. Tan, ML. "Stress evolution of tetrahedral amorphous carbon upon boron incorporation." Scripta materialia 57.2 (2007): 141-144. Link to SFX for this item
13. Lee, H.L. L. "Carbon-based composite thin films for use as microelectrode." Materials chemistry and physics 82.3 (2003): 567-570. Link to SFX for this item
View More...
View Less...
Select All Clear All

Expand list of advanced services Advanced
A service provided by the Library of the Wissenschaftspark Albert Einstein, Potsdam, Germany.
© 2005 SFX by Ex Libris Inc.