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Title:	Lead zirconate titanate MEMS accelerometer using interdigitated electrodes
Source:	Sensors and Actuators A-Physical [0924-4247] Yu, Han yr:2003

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description	12.	Rajaraman, S. "Microfabrication technologies for a coupled three-dimensional microelectrode, microfluidic array." Journal of Micromechanics and Microengineering 17.1 (2007): 163-171.
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description	14.	Xu, F. "Domain wall motion and its contribution to the dielectric and piezoelectric properties of lead zirconate titanate films." Journal of applied physics 89.2 (2001): 1336-1348.
description	15.	Bernstein, JJ. "Micromachined high frequency ferroelectric sonar transducers." IEEE transactions on ultrasonics, ferroelectrics, and frequency control 44.5 (1997): 960-969.
description	16.	Zhao, Y -P P. "Mechanics of adhesion in MEMS—a review." Journal of adhesion science and technology 17.4 (2003): 519-46.
description	17.	Seifert, S. "Dielectric and electromechanical properties of sol-gel prepared PZT thin films on metallic substrates." Journal of the European Ceramic Society 24.9 (2004): 2553-2566.
description	18.	Codner, M. A. "PR51AUGMENTATION MASTOPEXY." ANZ journal of surgery 77.s1 (2007): 72-73.
description	19.	de Reus, R. "Fabrication and characterization of a piezoelectric accelerometer." Journal of Micromechanics and Microengineering 9.2 (1999): 123-126.
description	20.	Seidel, H. "Capacitive silicon accelerometer with highly symmetrical design." Sensors and actuators. A, Physical 21.1-3 (1990): 312-315.