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Title:
Mapping of ion beam induced current changes in FinFETs
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Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions With Materials and Atoms [0168-583X] Weis, C D yr:2009
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author:
Weis, C D
Schuh, A
Batra, A
Persaud, A
Rangelow, I W
Bokor, J
Lo, C C
Cabrini, S
Olynick, D
Duhey, S
Schenkel, T
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author:
Weis, C D
Schuh, A
Batra, A
Persaud, A
Rangelow, I W
Bokor, J
Lo, C C
Cabrini, S
Olynick, D
Duhey, S
Schenkel, T
last name
initials
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author:
Weis, C D
Schuh, A
Batra, A
Persaud, A
Rangelow, I W
Bokor, J
Lo, C C
Cabrini, S
Olynick, D
Duhey, S
Schenkel, T
last name
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