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Title:
Measurement of the strain in strained-Si/Si0.79Ge0.21 with HRBS/channeling
Source:
Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions With Materials and Atoms [0168-583X] Matsushita, T yr:2006
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Matsushita, T
Sakai, W
Nakajima, K
Suzuki, M
Kimura, K
Agarwal, A
Ameen, M
Harima, H
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author:
Matsushita, T
Sakai, W
Nakajima, K
Suzuki, M
Kimura, K
Agarwal, A
Ameen, M
Harima, H
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initials
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author:
Matsushita, T
Sakai, W
Nakajima, K
Suzuki, M
Kimura, K
Agarwal, A
Ameen, M
Harima, H
last name
initials
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