Abstract
By sputtering1,2, it is possible to make multilayered structures (layered synthetic microstructures or LSMs) with individual layers as thin as a fraction of a nanometre. Using these techniques, we have now made a multilayered interference mirror to reflect carbon K X rays (λ = 4.48 nm) at normal incidence. The structure consists of 76 layers of tungsten of thickness 0.765 nm with layers of carbon (thickness 1.510 nm) interspersed, deposited on a 〈111〉 silicon wafer substrate. This LSM was formed into a concave mirror of radius ∼1.1 m by bending the substrate, and used in an optical set-up to form images of grids illuminated by an X-ray source. The mirror was found to have a resolution of 5 lines mm−1 and an efficiency, integrated over the C K band, of between 4 and 8%.
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Underwood, J., Barbee, T. Soft X-ray imaging with a normal incidence mirror. Nature 294, 429–431 (1981). https://doi.org/10.1038/294429a0
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DOI: https://doi.org/10.1038/294429a0
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