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Beobachtung von Elektronen-Channeling-Diagrammen im Augerelektronen-Spektrometer mit Rasterzusatz

Observations of electron channeling patterns in an auger electron spectrometer with scanning sample positioner

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Abstract

In the scanning electron microscope the electron channeling patterns allow us to determine the orientation and quality of single crystal objects. If the Auger spectrometer is equipped with a scanning sample positioner, the electron channeling patterns can be observed with primary energies used in Auger spectroscopy, i.e. 0.5–5 keV.

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Authors and Affiliations

  1. Institut für Angewandte Physik der Universität, D-7400, Tübingen, Fed. Rep. Germany

    H. Seiler, G. Kuhnle & H. Bauer

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  1. H. Seiler
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  2. G. Kuhnle
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  3. H. Bauer
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Seiler, H., Kuhnle, G. & Bauer, H. Beobachtung von Elektronen-Channeling-Diagrammen im Augerelektronen-Spektrometer mit Rasterzusatz. Appl. Phys. 6, 167–171 (1975). https://doi.org/10.1007/BF00883746

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  • DOI: https://doi.org/10.1007/BF00883746

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