Abstract
HOLLAND1 commented that certain workers2,3 interested in the production of vacuum-deposited thin films had shown that the electric arc could be used for this purpose. He noted that this method offered a possible solution to the problem of evaporating low-vapour-pressure metals which for various reasons could not be handled by the techniques then available. We have shown that, where films of uniform thickness are not required, the high deposition-rates obtainable from a vacuum-arc at a very short distance from the substrate greatly facilitate the production of pure films in poor vacua.
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References
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LUCAS, M., MEYER, D. Production of Superconducting Niobium Films by Vacuum-Arc Deposition. Nature 193, 766–767 (1962). https://doi.org/10.1038/193766b0
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DOI: https://doi.org/10.1038/193766b0
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