Abstract.
A strong influence of the polarization of the laser radiation on the geometry of laser-machined microdrillings has been observed for ultrashort pulses. For drillings with a certain aspect ratio, reflections at the hole walls take place, leading to a non-uniform intensity distribution deep inside the formed hole. Experimental and theoretical results on this subject are discussed. It is shown that a rotation of the polarization during the drilling process (“polarization trepanning”) significantly improves the quality of the produced holes.
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Received: 21 August 1998 / Accepted: 25 November 1998 / Published online: 17 March 1999
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Nolte, S., Momma, C., Kamlage, G. et al. Polarization effects in ultrashort-pulse laser drilling . Appl Phys A 68, 563–567 (1999). https://doi.org/10.1007/s003390050941
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DOI: https://doi.org/10.1007/s003390050941