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Received: 10 February 1998/Accepted: 12 February 1998
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Prevot, B., Fuchs, C., Henck, R. et al. Raman investigation of submicro-grained Si films obtained by incoherent UV photo-CVD of silicon hydrides . Appl Phys A 67, 139–145 (1998). https://doi.org/10.1007/s003390050751
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DOI: https://doi.org/10.1007/s003390050751