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Kinetics of laser-induced Au pyrolytic deposition from the liquid phase

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Abstract

Kinetics of Au pyrolytic deposition from organic solutions of triphenyl phosphine complexes induced by a copper-vapor laser beam is studied experimentally. Activation energies T a and pre-exponential factors are determined for 7 different Au complexes. Measured T a values range from 1800 K to 9400 K. The average temperature of the GaAs wafer is found to be 70° C for a laser beam power of 10 mW.

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Authors and Affiliations

  1. General Physics Institute of USSR Academy of Sciencies, Vavilov street, 38, Moscow, USSR

    M. R. Brook & G. A. Shafeev

  2. Moscow State University, Moscow, USSR

    K. I. Grandberg

Authors
  1. M. R. Brook
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  2. K. I. Grandberg
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  3. G. A. Shafeev
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Brook, M.R., Grandberg, K.I. & Shafeev, G.A. Kinetics of laser-induced Au pyrolytic deposition from the liquid phase. Appl. Phys. A 52, 78–81 (1991). https://doi.org/10.1007/BF00323689

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  • DOI: https://doi.org/10.1007/BF00323689

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