Abstract
The non-destructive standardless nuclear analysis technique Rutherford Backscattering Spectroscopy (RBS) is used to study interdiffusion phenomena in aluminium and gold layers with a high depth resolution, e.g., at the interfaces. A multilayered system consisting of alternate aluminium and gold layers was deposited under high vacuum conditions on polished glassy carbon and single-crystalline silicon substrates to investigate the interdiffusion of gold and aluminium in as-deposited layers. The characteristic peaks of gold and aluminium are in background-free regions of the RBS spectra if the layers are sufficiently thin and substrates like silicon with a low Z are used. The RBS results indicate that the Au-Al interdiffusion behaviour in as-deposited layers strongly depend on the conditions during deposition in the evaporation chamber.
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Received: 24 June 1996 / Revised: 8 November 1996 / Accepted: 14 November 1996
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Markwitz, A., Vandesteene, N., Waldschmidt, M. et al. Characterization of the interdiffusion in Au-Al layers by RBS. Fresenius J Anal Chem 358, 59–63 (1997). https://doi.org/10.1007/s002160050345
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DOI: https://doi.org/10.1007/s002160050345