Skip to main content
SpringerLink
Log in

Microhardness of (Ti,Al)N films deposited by reactive R.F. magnetron sputtering

  • Published:
Journal of Materials Science Letters

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

References

  1. H. FRELLER and H. FIAESSLER, Surf. Coatings Technol. 36 (1988) 219.

    Google Scholar 

  2. C. T. HUANG and J. G. DUB, Surf. Coatings Technol. 56 (1992) 51.

    Google Scholar 

  3. J. U. DUH and C. T. HUANG, Surf. Coatings Technol. 56 (1992) 61.

    Google Scholar 

  4. C. T. HUANG and J. G. DUH, Surf. Coatings Technol. 71 (1995) 259.

    Google Scholar 

  5. P. J. BURNETT and D. S. RICKERBY, Thin Solid Films 148 (1987) 41.

    Google Scholar 

  6. H. LI and R. C. BRADT, J. Hard Mater. 3 (1992) 403.

    Google Scholar 

  7. S. J. BULL and D.S. RICKERBY, in "Advanced Surface Coatings", edited by D. S. Rickerby and A. Matthews (Blackie & Son Ltd., London, 1991) p. 315.

    Google Scholar 

  8. B. JONSSON and S. HOGMARK, Thin Solid Films 114 (1984) 257–269.

    Google Scholar 

  9. O. KNOTEK, M. BOHMER, T, LEYENDECKER and F. JUNGBLUT, Mater. Sci. Eng. A105/106 (1988) 481.

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu, Taiwan, 300

    Chi-Tung Huang & Jenq-Gong Duh

Authors
  1. Chi-Tung Huang
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Jenq-Gong Duh
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Huang, CT., Duh, JG. Microhardness of (Ti,Al)N films deposited by reactive R.F. magnetron sputtering. Journal of Materials Science Letters 16, 59–61 (1997). https://doi.org/10.1023/A:1018548717316

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1023/A:1018548717316

Keywords

Search

Navigation