ISSN:
1662-8985
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
A compact angle-resolved secondary ion mass spectrometer (AR-SIMS) with a specialgeometrical configuration, composing of a differentially pumped micro-beam ion-gun, a tiltablesample stage and a time-of-flight (TOF) mass spectrometer was applied to measure angulardistribution (AD) of secondary ions ejected from VN by oblique 3 keV Ar+ sputtering at roomtemperature. AD of V+ was almost identical with that of N+, strongly suggesting that Gibbsiansegregation did not take place during sputtering. Since the angular dependence of VN+/V+ and V2+/V+intensity ratios was independent of that of N+ and V+ intensities, VN+ and V2+ dimer ions weregenerated via the “as such” direct emission process
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/39/transtech_doi~10.4028%252Fwww.scientific.net%252FAMR.11-12.607.pdf
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