Electronic Resource
Chichester [u.a.]
:
Wiley-Blackwell
Surface and Interface Analysis
22 (1994), S. 60-64
ISSN:
0142-2421
Keywords:
Chemistry
;
Polymer and Materials Science
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Physics
Notes:
Extracting chemical information from Auger data is an arduous task, particularly when signals result from the contribution of several components. The numerical method known as factor analysis (FA) can be powerful in enhancing the presence of poorly visible lineshape contributions and in quantification problems. Nevertheless FA is still little employed in Auger data handling.This paper deals with applications of Auger data factor analysis to the study of solid state reaction at oxide-oxide and metal-silicon interfaces.Attention is focused on the details of data pre-processing, observation of abstract solutions and physical significance of results.
Additional Material:
6 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/sia.740220116
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