ISSN:
1573-4803
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Abstract The results of a study of the preparation of epitaxial layers of indium phosphide on indium phosphide substrates by means of the PCl3-In-InP process are presented. The limitations of the process as discovered in this study are described. It is proposed that the major reaction species is phosphine and the unpredictable break-down of this compound, along with the presence of oxyhalides in the phosphorus trihalides, are the significant causes of the observed variation of the parameters of the epitaxial layers.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00542747
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