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  • 1
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: A compact coaxial electron cyclotron resonance (ECR) plasma source is built for plasma deposition experiments. The ECR plasma is produced in a coaxial line configuration and hence the source is compact. The plasma parameters (plasma density and electron temperature) are measured using a Langmuir probe. The plasma parameters are mainly dependent on the center conductor (stub) dimensions of the coaxial line. The characterization of plasma for both conical and cylindrical stubs is carried out and it is found that the conical stub produces relatively denser and more stable plasma than the cylindrical stub. The typical plasma density and electron temperature are 3×1010 cm−3 and 5 eV, respectively, for argon plasma. © 1996 American Institute of Physics.
    Type of Medium: Electronic Resource
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  • 2
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: In this ECR ion source, the possibility of maintaining the plasma by slow wave structures (SWS), helical coil, and slotted line antennas, in the region where wce, wpe (very-much-greater-than) wrf (wce, wpe, and wrf are electron cyclotron, plasma, and microwave frequencies, respectively) is exploited. The plasma parameters, plasma density, and electron temperature are maximized by coupling microwave (frequency: 2.45 GHz; power: 650 W) at two places in a magnetic mirror machine (mirror ratio Rm (approximately-equal-to) 1.45) to obtain higher beam current. Initially, the plasma is produced by coupling microwave to SWS at the mirror throat. The microwave is coupled by exciting the dominant slow wave field component of SWS, using an E-plane horn antenna. Then the plasma is brought to the region wce, wpe (very-much-greater-than) wrf at the mirror throat by increasing the magnetic field. Simultaneously, the ECR region is shifted from mirror throat to the center where second microwave coupling is done at the resonant region using another horn antenna. The characterization of plasma parameters are presented for both helical coil and slotted line antennas. Enhancement of plasma parameters are observed in the present scheme. Also, the SLA is found to produce better plasmas (ne ∼ 7 × 1012 cm−3 and Te ∼ 12 eV) than the helical coil and hence the SLA is chosen for the ion beam characterization. The extracted ion beam current density in the present scheme is ∼25 mA/cm2 at 2-kV extraction voltage.
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  • 3
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: This paper describes a new method of exciting slow wave structures (SWS) for obtaining high-density electron cyclotron resonance plasmas. The electric field component corresponding to the slow wave mode (SWM) of SWS is excited by an E-plane horn antenna. The special features of the microwave transmission line are the stable tuning for a given antenna and no requirement for water cooling on any of the components. Two types of SWS, a helical coil and a slotted line antenna, are studied, and the experiments are carried out in nitrogen and argon. The plasma producing capability is examined for these systems in the region wce,wpe(approximately-greater-than)wrf, where wce, wpe, and wrf correspond to electron cyclotron, plasma, and microwave frequencies, respectively. A high-density, large-diameter plasma (n0∼5×1011 cm−3; diameter ∼8.0 cm) could be obtained and the plasma could be maintained in the region 1≤wce/wrf≤2.
    Type of Medium: Electronic Resource
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