Publikationsdatum:
2012-11-10
Beschreibung:
The heating behavior of La NiO 3 (LNO) films on SiO 2 / Si substrate heated by 2.45 GHz microwave irradiation in the microwave magnetic field was first investigated, and then amorphous Pb ( Zr 0.52 Ti 0.48 ) O 3 (PZT) thin films were deposited on LNO-coated SiO 2 / Si substrates by a sol-gel method and crystallized in the microwave magnetic field. The crystalline phases and microstructures as well as the electrical properties of the PZT films were investigated as a function of the elevated temperature generated by microwave irradiation. The perovskite PZT films with a highly (100)-preferred orientation can be obtained by microwave annealing at 700°C for only 180 s of total processing time, and have good electrical properties. The results demonstrated that conductive metal oxide LNO as a bottom electrode layer is an advantage for the crystallization of PZT thin films by microwave irradiation in the microwave magnetic field.
Print ISSN:
0002-7820
Digitale ISSN:
1551-2916
Thema:
Maschinenbau
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