ISSN:
1432-0630
Keywords:
42.30
;
42.80
;
85
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
Abstract The capabilities of a one-dimensional filtering method for the detection of defects in periodic structures are derived by a detailed theoretical analysis. The signal-to-noise ratio is evaluated as a function of system parameters and a way is described to overcome the disturbing effect of phase defects. Finally, an extremely simple system is described which demonstrated the detection of defects below 2 μm. This demonstrated detection capability was limited by the available test mask and not by the detection system.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00899690
Permalink