Publication Date:
2020-11-16
Description:
The high flexibility, impermeability and strength of graphene membranes are key properties that can enable the next generation of nanomechanical sensors. However, for capacitive pressure sensors, the sensitivity offered by a single suspended graphene membrane is too small to compete with commercial sensors. Here, we realize highly sensitive capacitive pressure sensors consisting of arrays of nearly ten thousand small, freestanding double-layer graphene membranes. We fabricate large arrays of small-diameter membranes using a procedure that maintains the superior material and mechanical properties of graphene, even after high-temperature annealing. These sensors are readout using a low-cost battery-powered circuit board, with a responsivity of up to $$47.8$$ 47.8 aF Pa−1 mm−2, thereby outperforming the commercial sensors.
Print ISSN:
2096-1030
Electronic ISSN:
2055-7434
Topics:
Electrical Engineering, Measurement and Control Technology
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Energy, Environment Protection, Nuclear Power Engineering
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Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
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