ISSN:
1432-0630
Schlagwort(e):
61.40
;
68.70
;
81.10
;
82.40
Quelle:
Springer Online Journal Archives 1860-2000
Thema:
Maschinenbau
,
Physik
Notizen:
Abstract Using a unique fiber-growth control mechanism and high-reaction pressures (〉1 bar), silicon fibers were grown by laser-assisted chemical vapor deposition (LCVD) from silane near the focal point of a cw Nd:YAG laser beam. Fiber-growth rates ranged from 〈1 to 500 μm/s and fiber tip temperatures from 525 to 1412° C. At low fibertip temperatures (〈600° C) silicon fibers yielding glassy fracture were obtained. Some crystallinity was observed by X-ray diffraction. Polycrystalline silicon fibers were formed at intermediate temperatures, single-crystal silicon fibers at high-laser intensities and high-tip temperatures. The single crystal LCVD silicon fibers were formed by a vapor-liquid-solid (VLS) mechanism. Single-crystal VLS-LCVD silicon fibers were also obtained from liquid silicon-metal alloys by initiating fiber growth from the end of thin palladium, gold and platinum wires.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1007/BF00331224
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