ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
The design, construction, and performance of an automatic photometric ellipsometer with rotating analyzer for the VUV region (5–30 eV) is described. The use of a synchrotron radiation source and triple-reflection polarizers makes this new spectral region accessible to spectroscopic ellipsometry. New dielectric function data are presented for InP(110), YBa2Cu3O7, and epitaxial CaF2/Si(111).
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1140823
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