ISSN:
1432-0630
Schlagwort(e):
81.15.Lm
;
68.55+b
;
61.70.Jc
Quelle:
Springer Online Journal Archives 1860-2000
Thema:
Maschinenbau
,
Physik
Notizen:
Abstract Depressions and voids, morphological defects which are frequently encountered in LPE-layers of III–V compounds, are described. Their development is discussed for GaAs LPE layers exhibiting facet growth as well as terrace growth. Experimental conditions for the growth of depression- and void-free layers are specified.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1007/BF00896103
Permalink
