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Scanning differential optical profilometer for simultaneous measurement of amplitude and phase variation (1988)

See, C. W. ; Appel, R. K. ; Somekh, M. G.

Woodbury, NY : American Institute of Physics (AIP)

Applied Physics Letters 53 (1988), S. 10-12

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ISSN: 1077-3118

Source: AIP Digital Archive

Topics: Physics

Notes: A scanning optical profilometer is described which can simultaneously and independently measure the differential phase/amplitude variation of light reflected off an object surface. This information may then be interpreted as topographical and reflectivity variation of the object surface. The system is based on a heterodyne interferometer and uses two beams to probe the surface. The theoretical sensitivity of the system is 3×10−3 mrad in phase and 3 in 105 in reflectivity variation, both measured in a 1 kHz bandwidth. Preliminary measurements of film thickness and reflectivity variation are presented. This system also has potential applications for imaging objects with minute structural variations.

Type of Medium: Electronic Resource

URL: http://dx.doi.org/10.1063/1.100118

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