ISSN:
1432-0630
Keywords:
Secondary ion mass spectrometry
;
Depth profiling
;
Surface topography
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
Abstract SIMS depth profiles of copper-nickel thin film targets were measured with argon and nitrogen primary ions. While pronounced cone formation is observed in case of argon irradiation the erosion is much more uniform with nitrogen projectiles, probably due to formation of nitride surface layers.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00898370
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