Publication Date:
2015-04-24
Description:
Author(s): Keisuke Kitano, Katsuyoshi Suzuki, Kenji Ishizaki, and Susumu Noda We discuss three-dimensional (3D) photonic crystals fabricated by simultaneous multidirectional plasma etching. First, we investigate a method for controlling the ion sheath used in reactive ion etching for obtaining multidirectional etching. We then discuss the fabrication tolerance from an analyti... [Phys. Rev. B 91, 155308] Published Thu Apr 23, 2015
Keywords:
Semiconductors II: surfaces, interfaces, microstructures, and related topics
Print ISSN:
1098-0121
Electronic ISSN:
1095-3795
Topics:
Physics
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